Product category:
Actuators, motion systems, etc
News Release from: Aerotech | Subject: WaferMax Z vertical lift motorised position stage
Edited by the Manufacturingtalk Editorial
Team on 25 May 2004
Precision vertical lift stage positions
minutely
Precision vertical lift stage combines direct drive, linear motor technology with innovative mechanics for a competitively priced solution to sub-micron positioning.
Aerotech's new WaferMax Z vertical lift motorised positioning stage is delivered with a certified straightness/flatness accuracy of +/- 2æm and a positioning resolution of up to 0.83nm and yet its low profile, robust design is suited to demanding production system applications where high performance and competitive price are of prime consideration High bandwidth applications such as laser machining, semiconductor wafer inspection, flat panel display manufacture and many other precision processes in medical device and research fields require components to be positioned vertically with an exceptionally high degree of precision and with near perfect, parallel motion
This article was originally published on Manufacturingtalk on 11 Jul 2008 at 8.00am (UK)
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Typically combined with sub-micron, horizontal X-Y and rotary axes and all associated drives and controls, these applications are becoming increasingly demanding and require positioning systems that will perform in 24/7 production environments, have extremely low maintenance and can be simply integrated into the customers application with minimum cost.
To meet and exceed these considerable demands, the mechanical configuration of the WaferMax Z stage features a low profile wedge and base design secured in a preloaded cross roller bearing system with an integral linear motor and directly coupled high precision encoder.
A lateral stiffness device is used to minimise angular deviation during motion with impressive figures for pitch (20 arc sec), roll (20 arc sec) and yaw (20 arc sec).
Further reading
Sealed gantry handling system avoids dirt ingress
A sealed version of a linear motor driven, X-Y gantry system is particularly suited to applications such as high throughput laser machining and welding.
Open frame air bearing stage has long life
An open frame air bearing stage provides the specification for through-aperture step and scan positioning and uses preloaded air bearings, direct-drive linear motors and high resolution encoders.
Low profile rotary stage offers high speed
A low profile, high speed, compact rotary stage provides a solution for compact positioning spindle applications and operates at up to 15,000 deg/s.
With a 5mm travel range, the complete stage is just 50mm high and has a footprint of less than 250mm x 210mm including motor and encoder connectors.
In selecting a brushless "cog-free" linear motor rather than a conventional motor and leadscrew design, the WaferMax Z offers high stiffness yet extremely smooth velocity control with an error mapped and calibrated positioning accuracy of +/-1.5 micron and a bi-directional repeatability of +/-0.5 micron.
Direct drive technology also means that a maximum speed of 4mm/sec is achievable which ensures that components may be rapidly positioned and that high speed precision contouring, in combination with other axes may be realised.
Furthermore the linear motor drive and high resolution encoder system also allows complete in-position stability and extremely smooth slow speed performance.
These characteristics are an absolute requirement for "focussing" applications involving laser or electron beam machining, for dynamic adjustment of flatness in metrology applications and for semiconductor lithography.
The WaferMax Z also features a unique pneumatic counterbalance system to allow heavier load applications of up to 8kg.
The WaferMax Z forms part of a range of products which includes a complementary high precision rotary positioning stage, the WaferMax T which also boasts an equally impressive specification and competitive price.
Typical configurations would combine these stages with X and Y axis linear motor driven stages supplied as complete systems with the comprehensive range of Aerotech motion controllers and servo amplifiers.
Such systems are supplied complete with motor power and encoder cables and all performance and calibration related documents plus a CD with full interconnection drawings to help integrators with their own system documentation.
In addition, all motor parameter set-up data for the software configuration file is included; system commissioning is straightforward, requiring little more than connecting cables and applying power before programming application software.
These features are standard for every Aerotech product, ensuring that the true cost of ownership is extremely competitive. Request a free brochure from Aerotech ...
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