Product category:
Positioning stages - linear, rotary, multi-axis
News Release from: Aerotech | Subject: ABR1000 ultra-high precision rotary stages
Edited by the Manufacturingtalk Editorial
Team on 07 June 2004
Rotary stage meets nanotechnology
position needs
Air bearing rotary stage redefines accuracy and performance 'benchmarks' to meet the exacting demands of high precision electronics, optical and nanotechnology manufacturing industries.
Aerotech's ABR1000 ultra-high precision rotary stages combine air bearing technology and direct drive, slotless/brushless servomotors to provide unsurpassed error motion, wobble performance and velocity stability for high-throughput production and test applications such as MEMS (Micro-Electro-Mechanical Systems) MEMS is a specific area of Nanotechnology concerning the integration of sub-micron mechanical elements, sensors, actuators, and electronics on a common silicon substrate through various micro-fabrication techniques
This article was originally published on Manufacturingtalk on 11 Jul 2008 at 8.00am (UK)
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Aerotech motion systems described for automation
Motion systems for automatic laser working, medical and life sciences manufacturing systems are described in Aerotech's Automation Solutions brochure, also available in German.
This rapidly evolving technology demands enhanced-precision automated mechanical systems capable of providing highly stable, accurate and repeatable positioning platforms.
The ABR1000 is also well suited to other demanding manufacturing and test applications such as wafer inspection/singulation, DVD mastering, disk drive test/servo writing, optical inspection and fabrication.
The ABR1000's brushless, direct drive motor features a patented magnetic circuit to produce high torque with minimal heat which is essential for nanometre positioning applications.
Further reading
Sealed gantry handling system avoids dirt ingress
A sealed version of a linear motor driven, X-Y gantry system is particularly suited to applications such as high throughput laser machining and welding.
Open frame air bearing stage has long life
An open frame air bearing stage provides the specification for through-aperture step and scan positioning and uses preloaded air bearings, direct-drive linear motors and high resolution encoders.
Low profile rotary stage offers high speed
A low profile, high speed, compact rotary stage provides a solution for compact positioning spindle applications and operates at up to 15,000 deg/s.
The motor's slotless design provides zero-cogging and torque-ripple free performance resulting in exceptionally smooth velocity control throughout its 0 to 500 rpm speed range.
In addition it's high acceleration capability, in-position stability and inherently zero backlash is perfectly matched to high throughput electronic manufacturing applications.
With a nominal diameter of 175mm and overall height of just 100mm, the air-bearing surfaces within the low profile design have been maximised to ensure high-stiffness and high axial and radial load capacities of 650 N and 350 N respectively with an overhung loading of 28 Nm (tilt).
The ABR1000's specification for axial and radial error motions are <20 nm asynchronous and <100 nm synchronous measured to ANSI/ASME standards.
These figures are unsurpassed for commercially available rotary air-bearing stages and are complemented with equally impressive tilt errors resulting in face error motions and a total planar performance which is significantly better than other manufacturers' air-bearing tables and rotary spindles available today.
Directly coupled encoder feedback options for the ABR1000 include non-contacting, reflective and interferential types depending upon the resolution and accuracy requirements demanded by the application.
When combined with Aerotech's feedback multipliers and controls, they can provide calibrated angular resolution to <0.03 arc seconds and positioning accuracy to <1 arc second.
ABR1000 air-bearing stages are constructed in aluminium with a patented, Rockwell 62, "hard coat" Teflon impregnated finish for maximum durability.
The table top and base is supplied pre-drilled with several mounting holes and features a 35mm diameter through-hole for product feed through.
The non-contacting, air-bearing design means extremely long life and practically zero maintenance.
A wide range of options available for the ABR1000 include integral wafer chucks, disk chucks and clamps, accessories for ESD (electro static discharge) wafer fabrication and rotary unions for air and vacuum service.
Customisation options include rate table and inertial guidance test-stands.
In many applications the stage would form a part of fully integrated automation systems supplied by Aerotech and would typically include other positioning stages, motion and machine controls.
ABR1000 rotary stages are supplied as self-contained units with all motor and encoder feedback connectors integral within the housing keeping the overall footprint to a minimum.
All performance and calibration related documents and a CD with complete interconnection drawings are included along with motor parameter set-up data for the software configuration file to suit the control and drive selected.
Aerotech build these features into all of its products ensuring that the true cost of ownership is extremely competitive and that system commissioning is straightforward, requiring little more than connecting cables and applying power before programming application software. Request a free brochure from Aerotech ...
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