Product category:
Positioning stages - linear, rotary, multi-axis
News Release from: Aerotech | Subject: ABL3600 air bearing X-Y positioning stage
Edited by the Manufacturingtalk Editorial
Team on 22 February 2008
Open frame air bearing stage has long
life
An open frame air bearing stage provides the specification for through-aperture step and scan positioning and uses preloaded air bearings, direct-drive linear motors and high resolution encoders.
Aerotech's ABL3600 air bearing, linear motor driven X-Y positioning stage has an open frame design and is intended for applications requiring a large working aperture and perfect precision It can be used, for example, in semiconductor fabrication and test, scanning microscopy and other demanding scan and position applications
This article was originally published on Manufacturingtalk on 11 Jul 2008 at 8.00am (UK)
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Specifications for the 250mm x 250mm travel stage include a calibrated positional accuracy of +/-1 micron, a resolution range between 1 and 200 nm, and scanning speeds to 200mm/s.
Delivered as a completely tested and customer ready motion sub system with an integral granite base and full cable management, the ABL3600 can be customised with wafer chucks or other customer-specific fixtures.
The preloaded high-stiffness air bearing design used on the ABL3600 has been skilfully combined with the latest technology dual brushless and slotless linear motors to guarantee exceptionally smooth scanning performance and outstanding in-position stability, said Aerotech to manufacturingtalk.com.
Further reading
Sealed gantry handling system avoids dirt ingress
A sealed version of a linear motor driven, X-Y gantry system is particularly suited to applications such as high throughput laser machining and welding.
Low profile rotary stage offers high speed
A low profile, high speed, compact rotary stage provides a solution for compact positioning spindle applications and operates at up to 15,000 deg/s.
Rotary motion simulators test instruments
Rotary stage and control system for simulating rotary motion provides highly accurate angular rates, acceleration and position profiles for inertial component test systems and instruments.
The combination of direct-drive servo motors, preloaded air bearings and high resolution non-contact linear encoders provides friction free mechanics with zero-backlash and no wind-up.
It gives a major performance improvement over traditional bearing and mechanical transmission design technologies.
Further benefits of the non-contact design include virtually zero maintenance and an incredibly long working life - contributing to a very low total cost of ownership for such equipment.
* Maximum horizontal load capability - other impressive specifications include a maximum horizontal load capability of 30kg and for each axis, a maximum deviation straightness and flatness of +/-0.5 micron and +/-1.0 micron respectively measured 50mm above the tabletop.
Pitch and roll is within 3 arc-sec and yaw is 0.5 arc-sec.
Aerotech provide a choice of PWM or linear drive stage servo amplifiers to match application requirements.
PWM provides high performance acceleration and optimal maximum speed but for applications with the most rigorous in-position stability, sub-micron axis interpolation or for the lowest possible electrical noise emissions, linear drive stage amplifiers are the superlative choice.
* Motion controllers - motion controllers to match such demanding applications include Aerotech's A3200 Automation Platform - a PC based software only multi-axis motion and machine controller with FirewireR interfaced, DSP based servo drives and optionally integrated HMI, soft PLC and vision control modules.
The fully deterministic controller can be programmed using Aerotech's own AEROBasicT, RS274 G-code and Labview.
Alternatively programmers can call upon the powerful MicrosoftR .NET development environment to help reduce project development timescales with C, C++, VisualBasicR or Delphi based programming.
For a stand-alone alternative, Aerotech's new multi-tasking EnsembleT CP/MP/CL intelligent panel mount drives include a single axis motion controller with integrated PWM or linear servo amplifier capable of distributed high-speed serial networking for up to ten tightly synchronised axes.
Aerotech's mechanical systems and motion controls often include custom engineering to adapt standard designs to specific applications.
Modifications include tailored travel ranges, provision for customer supplied cabling and hose, supplying customised machine base, specialised fixtures, control consoles and cabinets.
Custom engineering may also be applied to software commands or program interfacing.
All Aerotech's products are supplied fully tested with certified documentation and with all application specific parameters such as servo amplifier gains and safety settings pre-configured.
Comprehensive pre and post sale technical support includes specialist product training at the customer's site or using internet based tuition. Request a free brochure from Aerotech ...
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