Product category:
Thermal processing equipment (drying, curing, etc)
News Release from: Elite Thermal Systems | Subject: Specialist furnace system
Edited by the Manufacturingtalk Editorial
Team on 21 October 2004
Specialist furnace system anneals Indium
wafers
A system for annealing indium wafers under clean room conditions has a 500 deg C oven and a special carrier assembly to insert the wafers into the heated zone of the system.
Elite Thermal Systems, based in Market Harborough, Leicestershire, UK, have designed and manufactured a system for annealing indium wafers under clean room conditions for use in opto-electronics The system is centred around an Elite oven that has a maximum temperature of 500 deg C
This article was originally published on Manufacturingtalk on 21 Oct 2004 at 8.00am (UK)
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The oven incorporates a 110mm reaction tube with a 600mm heated length.
Elite designed a special carrier assembly to insert the wafers into the heated zone of the system.
The carrier is passed into the heated zone of the reaction vessel by a gas tight manual push-pull rod mechanism.
They are then processed under a high purity hydrogen/nitrogen gas mixture controlled by flow meters and micro filters.
Loading and unloading of the wafers onto the carrier assembly is facilitated by a precision slide assembly, which allows the whole carrier slide and push rod assembly to be withdrawn clear of the reaction tube.
Alf Roberts, Managing Director of Elite said, "This was a challenging project due to the need to keep a clean and pure environment for the wafers".
"We are producing many more innovative designs to meet the needs of the opto-electronics market that have a very high degree of precision and sophistication", added Alf.
Elite produce a range a standard ovens and furnaces up to 2000 deg C, which are suitable for many applications.
Where specific thermal process characteristics are required, Elite will design a custom solution to meet the needs of the system.
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