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Electronics manufacturing: equipment, automation, software
News Release from: Sabic Innovative Plastics | Subject: Custom wafer heater assemblies
Edited by the Manufacturingtalk Editorial
Team on 05 October 2005
Custom wafer heater assemblies offered
An integrated heater assembly platform has been designed to help optimise the performance of heaters and electrostatic chucks used in electronic chip-making equipment.
To help optimise the performance of heaters and electrostatic chucks in chip-making equipment, GE's Quartz business today announced an integrated heater assembly platform based at the company's new laboratory in Kobe, Japan These custom assemblies - a critical subsystem of semiconductor equipment manufacturers' wafer chambers - combine customer-specific mechanical, electrical, and thermal engineering with GE's advanced chemical vapor deposited (CVD) ceramic heaters and e-chucks
This article was originally published on Manufacturingtalk on 26 Feb 2004 at 8.00am (UK)
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By considering thermal, plasma, mechanical, and electrical boundary conditions of the OEM's chamber, GE's new integrated design process helps optimise the performance of the entire system.
According to Chris Intihar, GE product manager, Wafer Processing, "GE has designed a new heater assembly platform with the customer's needs in mind".
"GE's Quartz business is the only known supplier to provide forward integration that will help semiconductor equipment firms improve the performance of the entire wafer chamber, while helping to maximise their internal engineering resources".
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"Our Kobe lab offers sophisticated design and testing capabilities and a dedicated technology team to help customers expedite their projects".
"To accelerate this iterative design process, we are leveraging our ceramics materials expertise from GE's Global Research Center in Niskayuna, New York".
"USA, and our advanced predictive engineering and modeling capabilities from our team at GE's John F Welch Technology Center in Bangalore, India".
"Our U.S.
plant at our Strongsville, Ohio, world headquarters and our Japan plant near Himeji City, also play an integral part of the design and manufacturing process." The GE technology team at Kobe will deliver complete heater assemblies featuring custom heaters, e-chucks, and its industry-standard quartz materials.
GE heaters and e-chucks are mechanically and thermally more robust than sintered ceramic alternatives.
They enable temperature ramp rates exceeding 10 deg C/second with maximum temperatures up to 1,300 deg C, and precise temperature control, generally within +/-1%.
These material performance advantages translate into increased throughput, greater process flexibility, and improved wafer yields for semiconductor equipment OEMs.
The Kobe facility, located in the Kobe International Business Center, is equipped with a Class 1000 (measured at 0.3 micron particulate level) or Class 100 (measured at 0.5 micron particulate level) clean room, thermal modeling capability, two test chambers capable of generating plasma and measuring electrostatic clamping force, multiple heater power supplies, and infrared cameras.
The new lab was officially opened on July 1, 2005.
* About GE's quartz business - GE's Quartz business is a world leader in the development and manufacture of fused quartz materials and products for the semi-conductor, fiber optic, and lighting industries.
The business is also a leading global supplier of advanced ceramics, boron nitride and titanium diboride powders, hot-pressed boron nitride and composite shapes, boron nitride coatings, and pyrolytic boron nitride and graphite products for use in semiconductor, electronic materials, personal care, materials processing, and other advanced technology applications.
* About GE Advanced Materials - GE Advanced Materials is a world leader in providing high-technology material solutions.
Headquartered in Pittsfield, Massachusetts, USA, its businesses include plastics, silicones, quartz, automotive, specialty film and sheet, polymershapes, and sealants and adhesives.
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