Excimer laser performance and life raised

Operating at 157nm, the fluorine excimer laser offers the shortest commercially available laser wavelength hands-free operation for 30 million pulses for micro-manufacturing and electronics.

Laser Lines (I and M) are pleased to announce a new version of the ExciStar M operating at 157nm from TuiLaser.

The fluorine laser offers the shortest commercially available laser wavelength.

Its maximum energy acts as a bright Fluorine-Star with repetition rates up to 100Hz and average power of > 1.4W.

Flexible design features make ExciStar M highly reliable with low operating costs.

The implemented laser tube design virtually reduces contamination while increasing the tube lifetime and decreasing operating costs.

The improved model features enhanced window lifetime providing hands-free operation for 30 million pulses.

This is achieved due to a further development of TuiLaser's CeraTube, eliminating the need for time consuming and costly window service.

This means a revolution in the fluorine excimer laser technology.

The improvements of the tube design enhances the window lifetime by more than a factor of 10 compared to other standard excimer lasers! Only F2-lasers - emitting at the very short 157nm wavelength - will enable the smallest achievable structure sizes, which are the key tools in creating micro-structures and ablation of interactive materials.

157nm radiation from F2-lasers may extend to well-known advantages of laser-material processing of materials not easily treatable by conventional laser light.

The fluor-version of the ExciStar M fits perfectly for applications like micromachining, photoionization and spectroscopy, for new fields like lithography and for the next generation of microelectronic chip manufacturing.

The light source is ideal for these applications because of avoiding thermal load and microcracking in the substrate.

Due to the high ablation quality, F2-lasers create new possibilities in downscaling devices for microelectronics, microoptics and driving industrial and biomedical innovations.

F2-lasers allow unsurpassed accuracy and much lower ablation thresholds in machining of materials such as quartz, PTFE, etc.

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