Position sensor with sub-nanometer resolution

Physik Instrumente (PI), part of Lambda Photometrics, has released PISeca, a single-electrode position sensor which can determine distance, position and length values with sub-nanometer resolution.

Capacitive sensors introduced by Physik Instrumente (PI), part of Lambda Photometrics, perform non-contact measurements against any kind of electrically conductive target.

PISeca D-510 sensor probes are available for measurement ranges of 20 um, 50 um and 100 um, electronically extendable up to 500 um.

In combination with PISeca E-852 signal conditioner electronics, they offer unmatched resolution to 0.2 nanometers (< 0.001 percent of the measurement range).

Due to integrated linearization, excellent linearity to 40 nanometers is reached.

With a high maximum bandwidth of up to 6.6 kHz, these sensor systems are also well-suited for dynamic vibration-measurement of machine parts.

Capacitive position sensors have been used for many years by PI for its own highest-precision nanopositioning stages.

PISeca single-electrode sensors are fundamentally very robust and have very high temperature stability.

Ease of integration of PISeca sensors is ensured by standardised sensor probes and signal conditioner electronics with an LED-bar gap indicator.

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