Product category:
Micro- and nano-machining
News Release from: Powerlase | Subject: 2kW laser - plasma - semiconductors
Edited by the Manufacturingtalk Editorial
Team on 25 May 2007
Laser made plasmas to make
semiconductors
A 2kW laser is specifically designed to power the generation of laser produced plasma, a technique for producing next generation semiconductors of 32nm and below.
A 2kW laser is specifically designed to power the generation of laser produced plasma, a technique for producing next generation semiconductors of 32nm and below A 2kW class laser places the laser produced plasma (LPP) EUV source approach as the main contender to be the source of choice for the high volume manufacturing of semiconductor chips
This article was originally published on Manufacturingtalk on 21 Jul 2006 at 8.00am (UK)
Related stories
Diode pumped laser offers average 800W power
A diode pumped Acousto-Optic switched laser, which has proven highly successful in a diverse range of applications, including high volume PCB production, microelectronics and machine tools.
Lasers to manufacture plasma display panels
Lasers have been developed for the manufacture of plasma display panel televisions and will increase the speed and flexibly of the rapid laser patterning manufacturing process.
Powerlase, manufacturers of the world's most powerful nanosecond Q-switched, diode-pumped solid state (DPSS) lasers, has announced the introduction of a new high power Starlase laser.
The 2kW class laser module combined with Powerlase's patented approach of spatial and temporal multiplexing will have a significantly positive impact on satisfying the requirements of the EUV source from a laser power point of view.
The new device firmly places the Laser produced plasma (LPP) EUV source approach as the main contender to be the source of choice for the high volume manufacturing of semiconductor chips.
Further reading
Laser etching lowers flat screen TV prices
Advanced, high power lasers have replaced conventional wet-etch photolithography to make pixel patterns and so lower the cost of manufacturing flat-screen television sets.
Travelling column VMC has dual-pallet indexing
Vertical machining centre with a travelling column design and integrated rotary dual-pallet indexing system provides higher levels of productivity and output and efficient workpiece loading/unloading.
DROs designed to maximise productivity
Acu-Rite will be demonstrating its family of ergonomically designed digital read outs along with MILLPWR, its two and half axis control system at the EMO show.
The combination of a high power laser per single module with the efficiency of the diode pumped solid state laser will make the LPP approach power scaleable to satisfy the demand of the industry at a low running cost.
* 2kW class Starlase laser - the Starlase laser will drive Powerlase's world leading research to achieve workable solutions for the high volume manufacture of semiconductor chips by 2009.
Powerlase recently announced a significant breakthrough in the scalability of the EUVL Sources by achieving the ability to multiplex modular lasers used in EUV source generation to increase power scalability.
The new laser will be used in further research offering high output power at a wavelength of 1064nm, short pulse and excellent beam properties well suited for the EUV generation.
It can be multiplexed to produce the power required to revolutionise semiconductor manufacture.
Samir Ellwi, vice-president Strategic Innovations of Powerlase commented, "The development of the 2kW class laser demonstrates our relentless drive to further developments in laser technology to meet real world needs.
Our existing technology is already proving world class for both PDP manufacture and our multiplexed EUV laser will transform semiconductor manufacturing." Tony King, CEO commented: "I'm delighted that we are continuing to break new ground in partnership with our customers and partners in forging the next generation technology for existing manufacturing challenges and in developing novel methods for emerging manufacturing techniques".
* About Powerlase - Powerlase Limited is an innovative, independent, high power laser company, focused on diode pumped solid state lasers developed for industrial applications primarily for use in the materials processing and microelectronics markets for flat panel displays, microelectronics, automotive and aerospace sectors.
Powerlase is supported by venture capital from MTI Partners, Deutsche Venture Capital, Esprit Capital Partners LLP (formerly Cazenove Private Equity), Alice Ventures and FNI Venture Capital.
V is ranked as the fifth fastest growing venture capital-backed company in the UK in the Daily Telegraph 2006 Business Growth Rankings.
• Powerlase: contact details and other news
• Email this article to a colleague
• Register for the free Manufacturingtalk email newsletter
• Manufacturingtalk Home Page
Search the Pro-Talk network of sites
