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Product category: Positioning stages - linear, rotary, multi-axis
News Release from: PI (Physik Instrumente) | Subject: Hybrid nanopositioning translation stage
Edited by the Manufacturingtalk Editorial Team on 19 February 2007

Hybrid nanopositioning translation stage

Physik Instrumente has announced the M-511.HD hybrid nanopositioning translation stage, overcoming the limitations of conventional precision positioning systems.

PI (Physik Instrumente), manufacturer of nanopositioning and precision motion-control equipment for nanotechnology, photonics, semiconductor and life science applications, offers the M-511.HD hybrid nanopositioning translation stage The new hybrid system overcomes the limitations of conventional precision positioning systems by combing the well-known piezo-flexure-drive advantages of unlimited resolution and rapid response with the long travel ranges and high holding forces of a servo-motor / ballscrew arrangement

Typical Applications are Nano-Metrology, Surface Inspection, Microscopy, Laser Technology and Interferometry.

Features and Advantages are: Combines Advantages of Piezo-Flexure Drives and DC-Servo / Ballscrew Drives, Long Travel Ranges to 100 mm, 4 Nanometer Linear Encoder Resolution, Reliable Execution of Nanometer Level Increments, Millisecond Settling Time to Nanometer Accuracy, Active Compensation of Stick/Slip During Startup and Settling, Active Backlash Compensation, Excellent Velocity Control, 100 kg Load Capacity, High Holding Forces with Minimum Power Consumption.

The highly specialised C-702 Hybrid Nanopositioning Controller reads the stage position from an integrated, 4 nm resolution linear encoder and continuously actuates both the piezoelectric and servo motor drives in a way to provide the best possible overall performance.

Due to its high stiffness and instantaneous, sub-millisecond response, the integrated piezo flexure drive provides active stick/slip compensation during startup and settling.

It also improves velocity control and is the key to achieving consistent and repeatable nanometer level positioning increments.

The C-702 Hybrid controller is equipped with a novel, high-speed encoder interface and can handle encoder count rates of 100 million pulses per second, without missing a single count.

Thanks to its real-time operating system, the intricacies of the hybrid drive are completely transparent to the user.

Interface to the host computer is via TCP/IP or RS-232; this interface makes it possible to operate and monitor the system over any TCP/IP-compatible network (intranet/internet). Request a free brochure from PI (Physik Instrumente) ...

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